ACEM_I	PS2CH1	TekCH4	700	0.400000	0.190000	2500	0
ACEM_II	PS2CH2	TekCH3	500	3.000000	1.450000	2500	0
ACEM_III	Off	Off	-	-	-	-
ACEM_IV	PS2CH4	TekCH2	700	0.500000	0.220000	2500	0
pCVD_I	PS3CH1	LCCH2	500	0.400000	0.190000	1000	30
pCVD_II	Off	Off	-	-	-	-
pCVD_III	PS3CH3	LCCH1	500	0.600000	0.290000	1000	20
pCVD_IV	PS3CH4	TekCH1	500	6.000000	2.800000	1000	40
pCVD_V	PS4CH1	LCCH3	500	0.600000	0.290000	1000	30
pCVD_VI	PS4CH2	LCCH4	500	0.600000	0.290000	1000	30
PIN_I	Off	Off	-	-	-	-
PIN_II	Off	Off	-	-	-	-
PIN_III	Off	Off	-	-	-	-
PIN_IV	Off	Off	-	-	-	-
PIN_V	Off	Off	-	-	-	-
PIN_VI	Off	Off	-	-	-	-